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Demand for silicon and wafers is rising rapidly, fuelled in particular by the fast-growing solar market and the steady expansion of the semiconductor industry. From raw silicon to the final wafer, large amounts of argon, hydrogen and nitrogen are required along the entire process chain. In addition, polysilicon and wafer manufacturers need electronic gases and chemicals that comply with the most stringent purity and consistency standards. At the same time, cost and environmental pressures call for greater process efficiencies.
Full solution provider
Linde provides an end-to-end offering for bulk gases, electronic special gases, services and hardware. As a full solution provider with extensive process knowledge, leading-edge development programmes and expert resources, we are committed to supporting this dynamic industry with customer-specific, cost-effective solutions backed by a global supply chain. Our innovative bulk special gas system (BSGS), for example, can be adapted to your individual needs. And our total gas & chemical management (TGCM) services make sure safety remains a top priority.
Our portfolio includes turnkey on-site facilities offering industry-leading energy efficiency and purity levels. Here compact, modular designs can help you meet technical roadmaps and cost pressures. You can rely on our market leadership in nitrogen generator technology and our innovative argon recovery solutions to achieve your efficiency and environmental targets.
Our offering includes:
- SPECTRA-N™ On-Site nitrogen generators
- On-site high-purity hydrogen generators
- Argon recovery solutions
Materials for wafers and polysilicon manufacture
Although requirements vary from one region to another, the following table shows the main bulk and electronic special gases/chemicals we supply to wafer and polysilicon labs:
|Bulk gases||Electronic special gases/chemicals||Hardware & services|
|Argon||Chlorosilanes (tri-, di-, chlorosilane), silane||Argon recovery system|
|Hydrogen||Dopants||Bulk special gas system (BSGS)|
|Nitrogen||Hydrogen chloride||Total gas & chemical management (TGCM)|